1/13/2024 0 Comments Nec tokin piezo actuators![]() Yabuno, H., Kaneko, H., Kuroda, M., Kobayashi, T.: Van der Pol type self-excited micro-cantilever probe of atomic force microscopy. ![]() Okajima, T., Sekiguchi, H., Arakawa, H., Ikai, A.: Self-oscillation technique for AFM in liquids. Lee, Y., Lim, G., Moon, W.: A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique. Ono, T., Li, X., Miyashita, H.: Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator. The theoretically predicted characteristics of the self-excited oscillation agree well with the experimental ones. We conduct an experiment using a cantilever as the resonator and produce self-excited oscillation via the feedback signal based on a phase shifter in a digital computer. This analytically reveals the parameter range of the phase shifter that produces self-excited oscillation in the resonator and the steady-state amplitude depending on the phase shift. We apply the method of multiple scales to the third-order ordinary differential equations expressing the coupling between the resonator and the phase shifter. We perform nonlinear analysis to clarify the finite steady-state amplitude of the self-excited oscillation by considering nonlinear damping without a Laplace transform in the frequency domain, and formulate the effect of the phase shifter using an ordinary differential equation. In this paper, we consider phase-shifted displacement feedback using a phase shifter. Self-excited oscillation is mainly produced by positive velocity feedback and time-delayed displacement feedback including phase-shifted displacement feedback. This is widely used in vibration sensors such as mass sensors, atomic force microscopes and stiffness sensors. Self-excited oscillation is a method to make a resonator vibrate at its natural frequency.
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